The specific process flow of silicon-based OLED displays can be divided into five parts, namely backplane process (driver backplane production), vapor deposition process, packaging process, screen body process, and module process:
(1) Driver backplate fabrication: CMOS backplates required for silicon-based OLEDs are fabricated using semiconductor processes, followed by the use of physical vapor deposition, chemical vapor deposition, yellow light exposure and development processes, etching processes, and other techniques to create anode reflection layers and anode confinement layers.
(2) Evaporation process: mainly includes substrate cleaning, organic material evaporation, and cathode material evaporation.
(3) Packaging process: Firstly, silicon-based OLED film packaging is fabricated using PECVD and ALD equipment; Then, by spin coating organic color filter materials with yellow light, the three primary colors (R, G, B) required for the production of silicon-based OLEDs are exposed and developed to complete the colorization process.
(4) Screen body technology: mainly includes the cutting and cleaning of large screen pieces, as well as electrical and visual inspection steps. After passing the inspection, they are stored in the warehouse.
(5) Module process: Through cleaning, adhesive bonding, cutting, appearance inspection, bonding, glue coating, appearance inspection, and testing, it is matured and packaged for storage after passing the inspection.